Design and Fabrication of an Array Microejector Driven by a Shear-Mode Piezoelectric Actuator
Abstract:This paper reports a novel actuating design that uses
the shear deformation of a piezoelectric actuator to deflect a
bulge-diaphragm for driving an array microdroplet ejector. In essence,
we employed a circular-shaped actuator poled radial direction with
remnant polarization normal to the actuating electric field for inducing
the piezoelectric shear effect. The array microdroplet ejector consists
of a shear type piezoelectric actuator, a vibration plate, two chamber
plates, two channel plates and a nozzle plate. The vibration, chamber
and nozzle plate components are fabricated using nickel
electroforming technology, whereas the channel plate is fabricated by
etching of stainless steel. The diaphragm displacement was measured
by the laser two-dimensional scanning vibrometer. The ejected
droplets of the microejector were also observed via an optic
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